Advancing Nano-Lithography

Summary : Kazuo Ushida: President, Nikon Precision Equipment Company: Advancing Nano-Lithography
Annexure : This interview with Kazuo Ushida - Director, Member of the Board & Senior Executive Officer of Nikon and President of its Precision Equipment Company - covers a wide range of topics. This includes how and why they are winning orders in immersion lithography with the S610C; design concepts behind their new ultra-productivity tools; how Skyhook vibration isolation technology works; progress in EUV; lens polishing, flare, performance and more. Find out why if an EUV lens was as big as the world, its biggest mountain could only be 2mm high.

You may like this also:

Access to and use of this Website is subject to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy.

Copyright © 2020 VLSI Research Inc. All rights reserved.