Lithography Panel 2007: Phil Ware, Canon

Summary : Lithography Panel 2007: Phil Ware, Canon
Annexure : In this video, Canon's Phil Ware discusses the issues surrounding the various lithography alternatives as nanochips plunge to dimensions of 32nm and below. In addition to the above topics, he offers what is probably the first public discussion of Canon's new 7000 scanner. It does both dry and wet and the first system has shipped. He describes why it's different and what it has to offer. He also discusses what he thinks are the next steps down litho road. Phil's got a great track record for predicting technical developments and he's always interesting . . .

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