Lithography Panel 2006: Gene Fuller, Nikon

Summary : Gene Fuller covers the latest progress in lithography at Nikon in both immersion and EUV.
Annexure :
 
In this video, Gene Fuller covers the latest progress in lithography at Nikon in both immersion and EUV. He boldly explains why 193nm is the end-of-the-road for shorter wavelengths when it comes to conventional optics. Fortunately, Nikon has made significant progress in EUV, where he talks about the latest results from a new lens. He covers the key issues regarding double patterning with immersion as well . . .

You may like this also:

Gene Fuller
Lithography Panel 2004: ...
16 Nov 2004
Lithography Panel 2004: ...

Lithography Panel: Gene Fuller, Nikon on... Immersion Lithography

Lithography Panel: Gene Fuller, Nikon on... Immersion Lithography ... See more

Gene Fuller
Lithography Panel: Gene ...
07 Dec 2005
Lithography Panel: Gene ...

Lithography Panel: Gene Fuller of Nikon on Immersion vs. EUV at 32nm

Lithography Panel: Gene Fuller of Nikon on Immersion vs. EUV at 32nm ... See more

Gene Fuller
Semiconductor lithograp ...
22 Oct 2003
Semiconductor lithograp ...

Gene Fuller and his views about the future of semiconductor lithography in 2003.

Gene Fuller and his views about the future of semiconductor lithography in 2003. ... See more

Nat Cieglio
Nat Ceglio: EUV Pioneer
01 Jan 1988
Nat Ceglio: EUV Pioneer

Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...

Nat was one of the prime movers of EUV and without his perseverance, EUV may never have happened. ... See more

Bill Arnold
Lithography Panel 2004: ...
16 Nov 2004
Lithography Panel 2004: ...

Bill Arnold of ASML discusses Immersion Lithography in this 2004 panel.

Bill Arnold of ASML discusses Immersion Lithography in this 2004 panel. ... See more

Bill Arnold
Semiconductor lithograp ...
22 Oct 2003
Semiconductor lithograp ...

Bill Arnold and his views about the future of semiconductor lithography in 2003.

Bill Arnold and his views about the future of semiconductor lithography in 2003. ... See more

Bill Arnold
Lithography Panel 2006: ...
31 Oct 2006
Lithography Panel 2006: ...

Bill Arnold draws on a wealth of knowledge gleaned from having lots of immersion ...

Bill Arnold draws on a wealth of knowledge gleaned from having lots of immersion lithography tools in the field ... See more

Bill Arnold, Gene Fuller, ...
Lithography Panel 2005: ...
07 Dec 2005
Lithography Panel 2005: ...

Lithography Panel 2005: Audience Q&A on... 32nm: Immersion or EUV?

Lithography Panel 2005: Audience Q&A on... 32nm: Immersion or EUV? ... See more

Phil Ware
Lithography Panel 2004: ...
16 Nov 2004
Lithography Panel 2004: ...

Phil Ware discusses Immersion Lithography in this 2004 panel.

Phil Ware discusses Immersion Lithography in this 2004 panel. ... See more

Arthur del Prado
A tribute to Arthur del ...
28 Oct 2016
A tribute to Arthur del ...

a real visionary for our industry the father of Europe’s equipment indust ...

a real visionary for our industry the father of Europe’s equipment industry Art had that rare ability to see a future that spanned technology, markets, people, and business models ... See more

Access to and use of this Website is subject to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy. By accessing or using this Website you agree to VLSI's Terms of Use (including Copyright Policy & Claims) and Privacy Policy.

Copyright © 2021 VLSI Research Inc. All rights reserved.