Lithography Panel 2006: Bill Arnold, ASML

Summary : Bill Arnold draws on a wealth of knowledge gleaned from having lots of immersion lithography tools in the field
Annexure :
 
In this video, Bill Arnold draws on a wealth of knowledge gleaned from having lots of immersion lithography tools in the field. He discusses the feasibility work they have done with customers to better understand its use with immersion. He also talks about the two EUV tools they shipped earlier this year . . .

You may like this also:

Copyright © 2018 VLSI Research Inc. All rights reserved.