Martin van den Brink

Summary : Martin van den Brink on 193nm Immersion Lithography
Annexure :
 
Martin van den Brink, then Executive Vice President Marketing & Technology of ASML, describes what's new in Immersion Lithography in this 2006 interview.  They were formally introducing a barrier shattering 1.35 Numerical Aperture (NA) scanner called the XT: 1900i. Martin tells what it is all about and what it does for chip making.

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