Lithography Panel 2004: Phil Ware

Summary : Phil Ware discusses Immersion Lithography in this 2004 panel.
Annexure :

Phil Ware discusses Immersion Lithography in this 2004 panel. Topics covered include: Will ArF immersion make it in time for the 65nm node? Where Canon stood with early results in immersion lithography are covered. What they were planning to do. What customers wanted in early tools and what they were willing to spend for prototypes. Canon’s strategy from its new management team and the corporate resources Canon can bring to lithography. Canon’s policy for moving management executives around from division to division is covered.

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