Lithography Panel 2004: Bill Arnold

Summary : Bill Arnold of ASML discusses Immersion Lithography in this 2004 panel.
Annexure :

Bill Arnold of ASML discusses Immersion Lithography in this 2004 panel. Topics covered include: Imaging results on ASML’s first prototype immersion ArF scanner. Compared to dry ArF scanners. NA’s achieved in these early tools. DoF – Depth of Focus. EUV attractiveness for extending beyond.

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