In this 2003 Lithography Panel of experts, Bill Arnold, Gene Fuller, and Phil Ware discuss then current views of the future of 193nm Numerical Apertures and k-factors for use in manufacturing semiconductors.
Lithography Panel Q&A with Bill Arnold, Gene Fuller, and Phil Ware.
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Bill Arnold and his views about the future of semiconductor lithography in 2003.
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Phil Ware and his views about the future of semiconductor lithography in 2003.
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