Semiconductor lithography history: dateline 2003 - Highest NA and Lowest K possible

Summary : What are the highest Numerical Apertures and k-factors that can be achieved with 193nm lithography for use in manufacturing semiconductors?
Annexure :

In this 2003 Lithography Panel of experts, Bill Arnold, Gene Fuller, and Phil Ware discuss then current views of the future of 193nm Numerical Apertures and k-factors for use in manufacturing semiconductors.

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