In this 2003 Lithography Panel of experts, Bill Arnold, Gene Fuller, and Phil Ware discuss then current views of the future of 193nm Numerical Apertures and k-factors for use in manufacturing semiconductors.
Lithography Panel Q&A with Bill Arnold, Gene Fuller, and Phil Ware.
Are Semiconductor Lithography Enhancing Technology options narrowing?
a real visionary for our industry the father of Europe’s equipment industry ...
Phil Ware and his views about the future of semiconductor lithography in 2003.
Bill Arnold and his views about the future of semiconductor lithography in 2003.
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