Semiconductor lithography history: dateline 2003 -193nm Immersion

Summary : Will 193nm Immersion lithography work?
Annexure :

In this 2003 Lithography Panel of experts, Bill Arnold, Gene Fuller, and Phil Ware discuss then current views of the possibility that 193nm immersion lithography might not work for manufacturing semiconductors. This is years before the technology would be in high volume manufacturing.

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