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They called it a Reduction Projection Aligner, or
RA for short, but what it was, was a stepper. It was probably given
the name to get around GCA’s very tight control of its trademarked
‘Direct Step on Wafer’, which was soon shortened to ‘wafer stepper’
by customers.
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Industry code: 1434.363 |
No Discernible U.S.
Copyright but possibly covered under Japanese Copyright |
Mfr’s Code: HTL |