Megavolt Ion Implantation Systems from High Voltage



High Voltage Engineering shipped the first commercial Ion Implanter, built in 1965 by Peter Rose. But it was not a Megavolt System such as depicted here. That took almost two more decades and a lot of research. Through it all, the company went on to establish practically the earliest true megavolt systems in the 1 and 2 MEV range. For several more years it remained the main source of these tools, which were to become critical for producing buried layers.



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Industry code: 1455.00

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