|
|
|
|
High Voltage Engineering shipped the first
commercial Ion Implanter, built in 1965 by Peter Rose. But it was
not a Megavolt System such as depicted here. That took almost two
more decades and a lot of research. Through it all, the company went
on to establish practically the earliest true megavolt systems in
the 1 and 2 MEV range. For several more years it remained the main
source of these tools, which were to become critical for producing
buried layers.
|
