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Started by Sam Harrell and Aubrey C. Tobey in the
early eighties, Micronix was planned to be the first lithography
system company to be dedicated exclusively to producing X-Ray
Systems. But it was not to be, for the X-Ray lithography business
was no more ready for prime time than it is today. Still, they
produced a mighty fine system, concentrating first upon getting
decent life out of the X-Ray tube. That they did, and for several
years sold their tubes to Pfizer Corporation for soft-X-Ray medical
systems. It held the company together, but producing viable
lithography systems for the integrated circuit industry proved
elusive.
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