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When Steve Irving began to experiment with the
first plasma etchers at Signetics in the late 1960s, the Tracerlab
division of LFE was the company he turned to for equipment. Back
then these were mostly ashers, or resist strippers, as they were
sometimes called. Data on those models are long gone.
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Industry code: 1473.51 |
Printed 1982, No
Discernible Copyright |
Mfr’s Code: LFE |
Posted by: Anonymous
Posted on: 06/10/08 11:06:04 PM This system was a water cooled planer etcher. the part tray was water cooled and the electrode was a copper coil wraped around the outside of the chamber. Many Years ago I used to build these and many other models during my 8 years at the company of LFE Plasma Systems. |