Model FPA141 Projection Aligner by Canon Inc.

Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answer to the threatening storms of the projection aligner revolution. It was a real performer, and well liked in Japan. Few were sold outside Japan in the beginning.

The company encountered difficulties with Perkin-Elmer. Lawsuits exploded, as did accusations; all of which were eventually resolved with ongoing royalty payments.

Canon learned, evolved and outperformed many of its arch rivals. Today it is a major source on the international equipment scene.

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Industry code: 1434.34

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Mfr’s Code: CAN

Posted by: Osborn,Tom
Posted on: 05/14/09 02:04:56 PM

You could install it in 1 day and then print submicron across the 10mmX10mm field. That at a time when installs took weeks for other steppers or months for an E-beam system. I believe it was defiantly a great proof of feasibility tool for submicron IC’s.

Posted by: Leebrick,David
Posted on: 08/31/08 04:44:30 PM

I first used the FPA-141 at Tektronix in development of 1um sized discrete transistors and then at Burroughs with magnetic bubble memories. This was the last of the table-top steppers from Canon, coming on the heels of the PPC-121 1X stepper and the FPA121 2X tool. Like the prior tools, this had manual through-the-lens alignment at h-line and exposed in g-line. Like the prior tools, it had manual (fixed) focus and used 4"x4" reticles. The 141 tool never made it into production of any size, due to it's highly manual operation mode. But it definitely proved that optics could break the 1um barrier, and proved to be an inexpensive research tool for many organizations.