From The Lab to The Fab:
Transistors to Integrated Circuits
Courtesy of The American Institute of Physics
Chapter 1: Intro thru The Planar Process
CP683,
Characterization and Metrology for ULSI Technology: 2003 International Conference,
edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla,
and E. M. Secula. © 2003 American Institute of Physics
Reprinted with permission from American Institute of Physics
Chapter 2: The Planar Process
Reprinted with permission from American Institute of Physics
Chapter 3: Integrated Circuit Scaling
Reprinted with permission from American Institute of Physics
