August,
99
386005
Historical
Perspectives
“Electon-beam lithography gets set for production.”
- Electronics: November, 1981
Also in that issue “Minicomputer
on a chip.”
“X-ray lithography goes commercial.”
- Electronics: February, 1982
“A lack of commercially available machines has
prevented most IC firms
from evaluating the technique.”
“Throughputs of 40 to 60 WPH on production equipment
have been verified.”
“Eaton is now ready to take orders . . . Deliveries
are to start in 3Q92.”