August,
99
386009
Economics of Direct Write
Direct Write is
Different
Reticles versus Writing
Its
like a Printer versus a Plotter
The Reticle Must Be Amortized
Product
Life is a Critical Factor
CoO = Tool(Cost/Exposure) +
Reticle(Cost/Life)
E-Beam CoO is Product Life Independent
CoO
= Tool(Cost/Exposure)
But
its Slow and Expensive