August, 99
38
6020
There’s Lots of Competition
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Different Technologies:
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EUV
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SCALPEL
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X-Ray
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Ion-Beam
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E-Beam Direct Write
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New Joint Ventures:
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Lucent/ASML/AMAT
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SCALPEL
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IBM/Nikon
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E-beam/Scalpel?
Practical & Cultural Barriers
But Don’t Write Off Optical