August,
99
386020
There’s Lots of Competition
Different Technologies:
•EUV
•SCALPEL
•X-Ray
•Ion-Beam
•E-Beam Direct Write
New Joint
Ventures:
•Lucent/ASML/AMAT
–SCALPEL
•IBM/Nikon
–E-beam/Scalpel?
Practical & Cultural Barriers
But
Don’t Write Off Optical