Cobilt - Autofab, Inline Resist Processing System

Summary : Early resist processing systems were notoriously difficult to keep running. They either gummed up or started breaking wafers.

Early resist processing systems were notoriously difficult to keep running. They either gummed up or started breaking wafers. So Cobilt created the motto: “Your yield is our concern”. Indeed, it was one of the first system companies to comprehend the importance of yield to its customers. And that makes sense, for by-and-large systems companies did not understand the concept of yield. If one of their systems was bad, they just reworked it; no system was ever trashed. Has a brand new automobile ever been trashed because of some defect? Not so with an integrated circuit. It is either good or bad; generally there is no in between and no rework is possible except in a few rare designs.

So with Cobilt’s emphasis on yield it shouldn’t come as too much of a surprise that Autofab lasted for almost fifteen years from the time of its introduction in 1974.

For a while TEL (Tokyo Electron Limited) manufactured a portion of Cobilt’s shipments. Meanwhile, in 1981, Applied Materials purchased Cobilt from Computervision, but then shut it down a year or so later. TEL acquired the manufacturing rights. Today Autofab’s remnants are embedded in the TEL photo resist line.

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  • Key Contributors: To Be Recognized.
  • Industry code: 1433.0
  • No Discernible Copyright
    Copied with the implied permission of the Copyright Owner
  • Mfr’s Code: TEL

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