Back in 2003, it looked like Lithography Enhancing Technologies for reticles and wafers using techniques like dog-bone tricks, hard masks, etchers, etc. were running out of steam. Would Moore’s Law finally come to an end? In this historic video from 2003, Lithography experts, Bill Arnold, Gene Fuller, and Phil Ware discuss the issue.
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Lithography Panel Q&A with Bill Arnold, Gene Fuller, and Phil Ware.
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Phil Ware and his views about the future of semiconductor lithography in 2003.
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Lithography Panel: Gene Fuller, Nikon on... Immersion Lithography
Phil Ware discusses Immersion Lithography in this 2004 panel.
Gene Fuller covers the latest progress in lithography at Nikon in both immersion ...
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