Semiconductor Lithography History: Dateline 2003 - Are Technology options narrowing?

Summary : Are Semiconductor Lithography Enhancing Technology options narrowing?
Annexure :

Back in 2003, it looked like Lithography Enhancing Technologies for reticles and wafers using techniques like dog-bone tricks, hard masks, etchers, etc. were running out of steam. Would Moore’s Law finally come to an end? In this historic video from 2003, Lithography experts, Bill Arnold, Gene Fuller, and Phil Ware discuss the issue.

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