X-Ray Exposure Source—The Model LSX10 by Karl Suss

The Karl Suss company was one of the first companies to explore commercial X-Ray exposure systems. Synchrotron sources were being bandied around, but they were so large and so expensive that an industry consortium would need to handle bringing them into existence. Since they could not be focused, numerous separate end-stations would be used for exposure. Research in X-Ray exposure would have been prohibitive.

This unit was designed as a research alternative, though it is likely that the company hoped it would also be used for early production. It provided the X-Ray source, while another—the LSX8—X-Ray stepper provided the end station. At the same time, and to boost interest, it was also suggested as a mask inspection tool and a mask copying tool.
 

Industry code: 1434.366

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Mfr’s Code: KLS