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This system, from about 1988, represents one of
the most successful tungsten deposition systems. It could easily put
down blanket tungsten, and though the brochures claimed it could do
selective tungsten, no company ever successfully put selective
tungsten into production.
Still, this system represented a great leap forward in automation
for Genus. It came at a time when the American equipment suppliers
were losing market share to the Japanese for reliability issues.
This system was designed with production in mind, with a full suite
of self-diagnostics. It was also one of the first systems to
incorporate a GUI and use software as a significant differentiator
over Japanese systems.
One of the interesting things about this brochure is the degree to
which Genus emphasized reliability and its global service
capability. This is in stark contrast to brochures from earlier
periods that emphasized technology.
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