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Remember when Varian was in the lithography business? You don’t?
Well, this was one of the top e-beam direct exposure systems in the early eighties. And what a deal, no masks! Many things we take for granted today were “Wow!†items back then: Auto wafer handling, much higher resolution than any optics system could do, as well as higher overlay accuracy. Moreover, while the system wafer throughput was low, the overall wafer throughput exceeded any optical system.
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Industry code: 1434.43 |
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Mfr’s Code: VAR |