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Varian 3280 Cassette-to-Cassette Sputtering System |
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The time was the early eighties. Change for
semiconductor equipment was in the air, you could almost smell it.
CVD was coming on strong, threatening every aspect of vacuum coating
for semiconductors. The coating companies themselves were dividing
into the two camps of e-beam versus sputtering. Ten years earlier
CVD comprised just 27% of the market. By 1983 it had grown to 41%
and was gaining fast, causing some to predict the demise of PVD.
However, during the same period sputtering had grown from 20% market
share to 81%, pushing e-beam into the far corner of a small niche.
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Industry code: 1463.432 |
No Discernible
Copyright. |
Mfr’s Code: VAR |