Model 216 Pyrox Reactor by Tempress/General Signal

You might think that some of the early glass deposition systems looked like grandma’s high-pressure steam cooker. You wouldn’t be far from wrong, because that’s exactly what they got their start in.

This model still retains that look, even though it survived well into the nineteen eighties. Original non-epitaxial ‘glass’ CVD films emerged in high temperature diffusion furnaces. Then it was recognized that by predoping and using pressure control the temperatures could be lowered to the range of 300-450 ºC. This beauty could operate at 40-100PSI in temperatures from 380-450 ºC.

Tempress was one of those early evergreen companies providing a wide range of equipment into the industry. It was acquired by General Signal in the late seventies in a move to become a general store for semiconductor manufacturing equipment.

Industry code: 1463.41

© 1979 General Signal
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Mfr’s Code: GSX