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The JBX-6A e-beam exposure system was one of the
few successful competitors to the Bell Labs e-beam exposure system
that would eventually spin out as ETEC and then be acquired by
Applied Materials.
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Industry code: 1435.33 |
©Possible Japanese
Copyright |
Mfr’s Code: Obsolete |
Posted by: Leebrick,David
Posted on: 08/31/08 04:57:36 PM My experience with the JBX6A was as part of the VHSIC program. We bought the tool after considering the Mebes AEBLE system and an experiemtnal tool under development by the Naval Ocean Systems Group. We used the tool to do 0.5um circuit prototyping of simple structures, small circuits, and even wafer-scale test structures. In cooperation with the VHSIC team at Honeywell, we built a proximity correction capability with correction rate of 1 Million shapes per hour. At that time, this was way beyond what was commercially available in proximity correction. We were among the first to use acid-catalyzed resists with an e-beam tool, that being the Shipley SAL601 material. The two or three years that I was owner of that JBX6A tool were probably the most fun that I have had in my litho career. When VHSIC funding declined, the tool was offered on the used equipment market. The guy who bought it came in a pickup truck, thinking he had bought a JEOL SEM. It actually took 2 semi-truck loads to contain the whole system.! |