|
AAI
|
File Type |
AAI - Series 1000 Automatic Test System: 1960s |
JPG |
| |
|
|
Accelerators
|
File Type |
Accelerators Inc.- 400 Series Ion Implanters: 1970s |
JPG |
| |
|
|
Accutest
|
File Type |
Accutest
- 103A Watch Circuit Tester:1970s |
JPG |
| |
|
|
ADAR
|
File Type |
ADAR - Doctor, Memory Tester:1970s |
JPG |
ADAR - MX-17 LSI Test System:1970s |
JPG |
| |
|
|
Advantest
|
File Type |
Advantest - 50th Anniversary:
2004s |
JPG |
Advantest - Excerpt from 1986 Annual Report:
1986s |
JPG |
Advantest
- T3342 VLSI Test System: 1985-89 |
JPG |
Takeda Riken - Article 1982:
1982s |
JPG |
Takeda Riken – Excerpt from 1983 Annual Report:
1983s |
PDF |
Takeda Riken - Excerpt from 1985 Annual Report:
1985s |
JPG |
| |
|
|
AMD
|
File Type |
AMD
- Automated Precision Manufacturing |
FLASH |
| |
|
|
AMI
|
File Type |
AMI - Series 2000, 2nd Op Station:
1980-84 |
JPG |
| |
|
|
Anelva
|
File Type |
Anelva - MBE 831 Molecular Beam Epitaxy System:
1985-89 |
JPG |
| |
|
|
Applied
Materials
|
File Type |
Applied
Materials - 7830Si CD-SEM: 1990s - Opal’s child. |
JPG |
Applied Materials - AME
8100 Batch Etcher: 1980-84 - The blockbuster that remapped the etch
market. |
JPG |
Applied
Materials - AMS 1000 Silox Reactor: 1970s |
JPG |
Applied
Materials - AMS 2000 Silox Reactor: 1970s |
JPG |
Applied Materials -
AMV CVD Reactors: 1960s - A hint of what would become the cluster
tool. |
JPG |
Applied Materials -
Autolign CA 3400 Mask Aligner: 1980-84 - The remnants of a failed
merger. |
JPG |
Applied Materials - CA-2020H Mask Aligner:
1980-84 |
JPG |
Applied Materials - CA-800 Mask Aligner and Exposure System:
1980-84 |
JPG |
Applied
Materials - Endura 5500 PVD: 1985-89 - The first
bullet-proof multichamber, multiprocess system. |
JPG |
Applied
Materials - Implant 9000, Ion Implanter: 1985-1989 |
JPG |
Applied Materials - Nitrox AMN-710:
1960s
- Improved yields by sealing oxide pin holes. |
JPG |
Applied
Materials - P5000, Etcher: 1985-89 - Followed the 8300, but was
eclipsed. |
JPG |
Applied
Materials - PECVD_application-bulletin: 1970s |
JPG |
Applied
Materials - Precision 5000 CVD, The blockbuster that made
cluster tool a household name (at least
in fab households:
1985-89 |
JPG |
Applied
Materials - Precision Etch 8300: 1985-89 - The extension of
the blockbuster that remapped the etch market. |
JPG |
Applied
Materials - Precision Implant 9000: 1985-89 - Lintott’s
child and another blockbuster. |
JPG |
Applied Materials - Series 7600 Epitaxial Reactor System:
1970s -
The system that built the company. |
JPG |
Applied Materials - Silox Model
AMS 1200: 1960s - Wafers were laid out by hand inside the chambers. |
JPG |
Applied Materials - Silox Model
AMS 2600 & 2660: 1960s - An early tool for low temperature oxides. Used for
reflow,
these tools improved metal yields substantially. |
JPG |
Applied Materials - SPCVD-4000:
1960s
- An LPCVD tool from a time when Applied could do little right.
The vacuum
pump created a vibration that caused wafers to rotate in their
boat. It was one of the tools Jim Morgan killed
as he was turning the company around in the late seventies. |
JPG |
Applied
Materials - The Mirra CMP System: 1990s - The first CMP tool that was really
ready for manufacturing. |
JPG |
Applied Materials - The Omega-Centura System:
1990s |
JPG |
Dan Maydan: The Early Days of Applied Materials
|
Video |
Dan Maydan: Building Applied Materials into a Multi-Product Company
|
Video |
Dan Maydan: Lessons Learned at Applied Materials
|
Video |
Jim Morgan: Bringing Focus to AMAT
|
Video |
Jim Morgan: Building a Global Position
|
Video |
Jim Morgan: Keys to Success
|
Video |
| |
|
|
APT
|
File Type |
APT -
9155 E-Beam Resist Processor:
1985-89 |
JPG |
| |
|
|
Aquest
|
File Type |
Mihir Parikh: The History of Automation in the Semiconductor
Industry |
Video |
Mihir Parikh: Lessons Learned
|
Video |
| |
|
|
ASET
|
File Type |
ASET - Model 1562 g-Line Stepper:
1985-89
- Once a leader, they died after Japan’s onslaught. |
JPG |
|
|
|
|
ASM
Assembly Automation
|
File Type |
ASM Assembly Automation - PF530, 3rd Op Station: 1980-84 |
JPG |
|
|
|
|
ASM/Lawton
|
File Type |
ASM/Lawton - Encapsulation Press: 1970s - Helped make all
those plastic DIP packages possible. |
JPG |
| |
|
|
ASM
International
|
File Type |
Peo Hansson: Using Math & Science
and Getting Paid Good Money
to See the World |
Video |
|
|
|
|
ASML
|
File Type |
ASML - PAS 2000 Wafer Stepper
: 1980-84 |
JPG |
ASML - PAS 2500/10 Stepper:
1985-89 |
JPG |
ASML -
PAS 2500 Series Wafer Steppers:
1985-89 |
JPG |
ASML
- PAS 5500/400, Step & Scan System: 1990s - See the insides of
the product that built ASML’s leadership. |
JPG |
ASML - Philips Beamwriter:
1985-89 |
JPG |
ASML - Twinscan, Step & Scan Aligner:
1990s |
JPG |
Martin van den Brink: The Rise of ASML |
Video |
Reflect & Imagine 20 Years
of ASML |
PDF |
|
|
|
|
Asyst
|
File Type |
Asyst
- SMIF System: 1990s |
JPG |
| |
|
|
BTU
|
File Type |
BTU - Bruce Diffusion Furnaces:
1980-84 - A Real Workhorse from the Early Days. |
JPG |
| |
|
|
Cambridge
Instruments
|
File Type |
Cambridge Instruments - EBML 300:
1985-89
- Maskless Lithography from twenty years ago. |
JPG |
| |
|
|
Cameca
|
File Type |
Cameca -
600 Series Steppers: 1980-84 |
JPG |
Cameca - ARW Aligner Repeater: 1980-84 |
JPG |
Cameca - XPWS 301 Proximity Step and Repeat System:
1980-84 -
Thompson’s x-ray spin-off. |
JPG |
| |
|
|
Cammax
Precima |
File Type |
Cammax Precima -
PRS14E Photoresist Spinner: 1990s |
JPG |
| |
|
|
Canon
|
File Type |
Canon
- FPA-3000 EX4 Aligner: 1990s |
JPG |
Canon - FPA-5000 ES2 Aligner:
1990s - An early DUV scanner. |
JPG |
Canon - Model FPA141 Projection Aligner:
1980-84 - The contact aligner Japan
used to make its first 64K DRAMs. |
JPG |
Canon - PLA 501F/FA Proximity Aligner:
1970s |
JPG |
Canon - Various models of Mask Aligners:
1980-84 - The only company
to offer all 3 types of litho tools. |
JPG |
| |
|
|
Censor
|
File Type |
Censor - SRA-100 Mask Aligner:
1970s - Backed by Porsche and Gordon
Moore and it still went wrong. |
JPG |
| |
|
|
Chuo Riken
|
File Type |
Chuo Riken
- Resist Processing Equipment: 1980-84 |
JPG |
| |
|
|
Cobilt
|
File Type |
Cobilt - Autofab, Inline Resist Processing System: 1970s - Note the cleanroom attire and a
young Sam Harrell. |
JPG |
Cobilt
- Model AF110 Brushless Scrubber: 1980-84 |
JPG |
| |
|
|
CONVAC
|
File Type |
CONVAC
-
APTCON 3000 Modular Spin Processing Equipment: 1995s |
JPG |
CONVAC - Coating Equipment:
1980-84 |
JPG |
CONVAC
-
Modul 2000 series: 1990s |
JPG |
CONVAC
- Modul 6000 series: 1990s |
JPG |
CONVAC
-
Photo Mask Processing Equipment: 1980-84 |
JPG |
| |
|
|
Dage Precima
|
File Type |
Drytek
- DRIE 100 Plasma Etcher: 1980-84 |
JPG |
| |
|
|
DFMSim
|
File Type |
Anantha Sethuraman: Copper Interconnect – How an Unusual
Source & Marketing Helped Make It Happen
|
Video |
| |
|
|
Drytek
|
File Type |
Dage Precima - IS-4, 2nd Op Station: 1980-84 |
JPG |
| |
|
|
DW
Industries
|
File Type |
DW
Industries - Model 632 Vacuum Deposition System: 1960s |
JPG |
| |
|
|
Eaton
|
File Type |
Eaton - LSI Series Wafer Processing Systems: 1980-84 |
JPG |
Eaton - Optimetrix 8000 Series: 1980-84 - From the West
Coast’s premier, but now dead, stepper company. |
JPG |
Jim Bowen: Eaton’s Semiconductor Equipment Foray, a case study
|
Video |
| |
|
|
Edwards
|
File Type |
Edwards
- Thin Film Deposition System: 1980-84 |
JPG |
| |
|
|
Electroglas
|
File Type |
Electroglas
- Model
131B wafer prober, pathfinder to fully automated wafer
processing: 1960s |
JPG |
Electroglas
- Model 3001 Wafer Prober System: 1990s |
JPG |
| |
|
|
Electromask
|
File Type |
Electromask - 700SLR Stepper:
1970s - Arguably the best stepper of
its day, based on resale values. |
JPG |
| |
|
|
Electronic
Visions |
File Type |
Electronic Visions - EV150 Resist Processing System:
1990s |
JPG |
| |
|
|
ESEC Group
|
File Type |
ESEC Group Products:
1990s |
JPG |
| |
|
|
Fairchild
|
File Type |
Fairchild
Instrumentation - Model 4000M IC Test System: 1960s
- Workhorse of the
infant industry. |
JPG |
Fairchild Semiconductor Corporation - Fairchild Silicon
Transistors:
Pre-History |
JPG |
Fairchild
Semiconductor Corporation - First Monolithic Silicon IC Chip:
Pre-History
|
JPG |
Fairchild
Systems Technology - Sentry 400: 1970s - Possibly the
1st high speed, high pin count, LSI Test System. |
JPG |
Jim Bowen: The Turn Around at Fairchild Test Systems Group |
Video |
Jim Bowen: Building Fairchild Test Systems Group into a Global Giant |
Video |
Jim Bowen: Lessons Learned at Fairchild Test Systems Group |
Video |
| |
|
|
FSI
|
File Type |
FSI
- 8251 Clean Machine: 1980-84 |
JPG |
FSI - Polaris, Coating System:
1990s |
JPG |
| |
|
|
Fusion
|
File Type |
Fusion - 200 PCU Photostabilizer:
1990s |
JPG |
Fusion - Dual Chamber Photostabilizer:
1990s |
JPG |
Fusion - MICROLITE Series 150:
1985-89 |
JPG |
Fusion - UV Gemini Photostabilizer:
1990s |
JPG |
| |
|
|
Gasonics
|
File Type |
Gasonics
- HiPOX
System: 1970s - Possibly the only successful high pressure system. |
JPG |
| |
|
|
GCA
|
File Type |
Aubrey (Bill) Tobey: History of the Stepper |
Video |
Aubrey (Bill) Tobey: The Bob Graham Award
was honored for conceptualizing the wafer stepper in the late
1970s,
a great feat of product marketing. |
Video |
GCA - 8500
Series Ion Implanter: 1970s |
JPG |
GCA
- Mann
4800 Direct Step on Wafer System: 1970s - It broke the 1 micron CD barrier. |
JPG |
GCA - Model 8000 DSW Wafer Stepper: 1980-84 - The beginning
of the end for GCA. |
JPG |
GCA
- The Mann 3600 Photo Repeater: 1970s |
JPG |
GCA - Wafertrac® Resist Processing System:
1970s
- Remember air track? It was all the rage in the days when technocool won out
over particle counts. Ask anyone who ever sold one, these were
one of the worst tools ever sold. Yet they
sold them by the boat load – ask anyone who sold against them. |
JPG |
GCA
XLS - Advanced Microlithography System, The last of a grand line:
1990s
- The failure that was supposed to save the U.S. lithography infrastructure. It was simply a case
of too little, too late. |
JPG |
| |
|
|
Genus
|
File Type |
Genus
- 1510 MeV Ion Implanter:
1985-89 |
JPG |
Genus - 8720 Tungsten CVD System: 1985-89 - The cutting edge of tungsten
deposition in the late eighties. |
JPG |
| |
|
|
GS Blue
M Electric |
File Type |
GS Blue M Electric:
1990s |
JPG |
| |
|
|
Hampshire
|
File Type |
Hampshire - Series 3500 X-Ray Lithography System:
1990s |
JPG |
| |
|
|
Headway
Research |
File Type |
Headway Research - LS22 Spinners:
1990s |
JPG |
Headway Research - R & D Spin Coater:
1990s |
JPG |
| |
|
|
High
Voltage Engineering
|
File Type |
High Voltage Engineering - Megavolt Ion Implantation Systems:
1980-84 |
JPG |
| |
|
|
Hitachi
|
File Type |
Hitachi
- HL-700, E-beam Lithography System: 1990s - Rare captively made
e-beam system that would break
out
into the commercial world. |
JPG |
Hitachi - RA-101HL & RA501HL Wafer Stepper:
1980-84 - Rare captively made stepper with
a Minolta Lens. |
JPG |
| |
|
|
Hugle
Industries |
File Type |
Coming soon... |
|
| |
|
|
IBM
|
File Type |
Gary Patton: What Math & Science Have Done for Me |
Video |
Lisa Su: What Math & Science Have Done for Me
|
Video |
| |
|
|
IMS
|
File Type |
IMS
- Ion Beam Exposure Tool: 1985-89 |
JPG |
| |
|
|
Integrated
Technologies
|
File Type |
Integrated Technologies - P 3201 Coater: 1980-84 - Another
of the many early companies that failed. |
JPG |
| |
|
|
Intel |
File Type |
Andy Grove: The Development of R & D and Manufacturing Strategy
at Intel |
Video |
Andy Grove: The Evolution of Semiconductor
Manufacturing
|
Video |
Craig Barrett: Math, Science, & Your Future
|
Video |
Craig Barrett: How Intel Rebuilt Manufacturing in the mid-80’s
|
Video |
Craig Barrett: American Competitiveness
|
Video |
Intel 4004:
1970 - The World's First Microprocessor |
JPG |
Intel - 8008 CPU:
1970 |
JPG |
Intel - Environmental Health and Safety:
1994 |
JPG |
Mark Bohr: What Math & Science Have Done for Me
|
Video |
Sean Maloney: Dynamic Duo
|
Video |
Sunlin Chou: Intel's
R&D Pipeline
|
Video |
The Cook's Tour: An Intel Cleanroom Circa 1980
|
Video |
The Cook's Tour: Intel Fab 17 Circa 2000
|
Video |
The Cook's Tour: Intel Fab 11X Circa 2004
|
Video |
Yan Borodovsky: Breaking the Limits, Solving the Unsolvable
|
Video |
| |
|
|
Irie
Seisakusho |
File Type |
Irie Seisakusho - Spin Drier:
1980-84 |
JPG |
| |
|
|
JEOL
|
File Type |
JEOL - JBX-6A Electron Beam Exposure System:
1980-84 - A 6th gen
maskless litho tool from the early 80’s. |
JPG |
| |
|
|
JSR
|
File Type |
JSR - Plasmaster-Si, Silylation System:
1985-89 |
JPG |
| |
|
|
Karl
Suss |
File Type |
Karl Suss - ACS200 Lithography Cluster:
1990s |
JPG |
Karl Suss - LSX10 X-Ray Exposure Source:
1985-89 |
JPG |
Karl Suss - RC8-RC33 Spin Coaters:
1990s |
JPG |
| |
|
|
Kasper
|
File Type |
Kasper
- Uniplane
System 4000 High Pressure Scrubber: 1970s |
JPG |
| |
|
|
KLA-Tencor
- Partner
|
File Type |
KLA-Tencor - KLA ADD/100 Series: 1980 |
PDF |
Technology, Circa 1981 – KLA Conquers the Pellicle: 1981 |
JPG |
Technology, Circa 1981 – KLA Lays out the Future of Yield Management: 1981 |
JPG |
KLA-Tencor - KLA 2020: 1984 |
JPG |
Technology, Circa 1991 – KLA Conquers Phase Shift: 1991 |
PDF |
Tencor at 20 Years |
PDF |
| |
|
|
Kokusai
|
File Type |
Coming soon... |
|
| |
|
|
Kulicke
& Soffa |
File Type |
KULICKE & SOFFA - 50th Anniversary
|
Video |
Kulicke
& Soffa - Model 1471 Wedge Bonder: 1985-89 |
JPG |
Kulicke & Soffa - Wire Bonding Advancements Circa 2006
|
Video |
| |
|
|
Lam
Research - Contributing Sponsor
|
File Type |
Lam Research: the Early Years |
JPG |
Lam Research - Auto Etch 590 Oxide Etcher: 1985-89 |
JPG |
Lam Research -
Excerpt from 1984 Annual Report |
JPG |
Lam Research -
Excerpt from 1999 Annual Report |
JPG |
| |
|
|
LASA
Industries
|
File Type |
LASA
Industries - Prototype, The very first factory-in-a-box chip dispensing
system: 1985-89 |
JPG |
| |
|
|
Lasarray
|
File Type |
Lasarray - DWL 2.0, Laser Stepper:
1990s - A failed attempt at maskless lithography. |
JPG |
| |
|
|
Leica
|
File Type |
Leica - VB 5/6 and ZBA 31H/32 E-Beam tools:
1990s - The child of
the legendary Cambridge maskless systems. |
JPG |
| |
|
|
Leybold
|
File Type |
Leybold
- Heraus-4 inch CZ crystal grower: 1980-84 |
JPG |
Leybold
- Heraus-Vertical In-Line Sputtering System: 1980-84 - An early disk
coating system. |
JPG |
| |
|
|
LFE |
File Type |
LFE
Corporation - 501 Chrome Etch System: 1970s - Not the first such system,
but near the first. |
JPG |
| |
|
|
Lintott |
File Type |
Lintott - Early Ion Implanter: 1970s - One of the first commercial high
current ion implanters. |
JPG |
| |
|
|
Macrodata
|
File Type |
Macrodata
- MD100 Test System:
1970s |
JPG |
| |
|
|
Microair
|
File Type |
Microair
- laminar flow clean bench: 1980-84 |
JPG |
| |
|
|
Micronix
|
File Type |
Micronix
- MX-15 X-Ray Lithography System: 1980-84 -
The first commercial American X-ray lithography system. |
JPG |
| |
|
|
MRC
|
File Type |
MRC
- Series 900 In-Line Sputtering System: 1970s |
JPG |
| |
|
|
MTI
|
File Type |
MTI - Model
6300 Scrubber: 1970s |
JPG |
MTI
- MultiFab System Overview: 1985-89 |
JPG |
MTI
- Omnichuck: 1980-84 |
JPG |
| |
|
|
Mühlbauer
|
File Type |
Mühlbauer - VideoSem, Die Bond Inspection Station:
1990s |
JPG |
| |
|
|
Nikon
|
File Type |
Nikon
- 25 Years of Innovation |
JPG |
Nikon
- NSR-1505G2A stepper: 1980-84 |
JPG |
Nikon
- NSR 1755EX8A Step-and-Repeat System: 1990s - An early excimer
laser stepper for 0.45 micron. |
JPG |
Nikon
- NSR 2005 i10C/i9C i-line Stepper: 1990s |
JPG |
Nikon - NSR-2205i11D Step-and-Repeat System:
1990s - The state-of-the-art
workhorse for 0.35 micron. |
JPG |
Nikon - NSR Series Steppers: 1980-84 - The series that launched a
thousand careers. The NSR series would become the chip maker’s model of reliability, forcing all equipment manufacturers to build reliable tools. |
JPG |
| |
|
|
Nippon Seiko
|
File Type |
Nippon Seiko - TZ-310 Exposure System:
1985-89 |
JPG |
| |
|
|
Novellus
|
File Type |
Novellus - Copper:
1998 - This ignited the Copper Revolution |
Video |
Novellus
- Concept
One CVD Dielectric Deposition System: 1958-89 |
JPG |
Silicon Valley Alternatve Energy
Summit |
Video |
| |
|
|
Optical
Associates |
File Type |
Optical Associates - DUV
40KX Ultracure System: 1985-89 |
JPG |
| |
|
|
Pacific
Western |
File Type |
Pacific Western
- Model 560 ‘COYOTE’ PECVD System: 1980-84 |
JPG |
Pacific
Western - The Probe II Wafer Prober by Pacific Western Systems:
1960s
- The First Intelligent Wafer Probe System. |
JPG |
| |
|
|
Perkin-Elmer
(Acquired
by Silicon Valley Group) |
File Type |
Dave Markle: Ultratech/Perkin Elmer - Math, Science &
Creativity |
Video |
Dave Markle: Ultratech/Perkin Elmer - The Development of the
Projection Aligner |
Video |
Perkin-Elmer:
Coming Soon - Industry's first true Step-and-Scan series. |
|
Perkin-Elmer
- MEBES Pattern Verifier System: 1980-84 - It only took 196M Bytes of
disk storage for masks in 1983,
but hasn’t changed is the 24 hours takes to write an advanced
one. |
JPG |
Perkin-Elmer - Micralign 600:
1985-89 - A pinnacle technically, it
was also the end of the road for projection aligners. |
JPG |
Perkin
Elmer - Micralign Projection Mask Alignment System: 1970s -
The Intel secret weapon that turned the
industry upside-down and revolutionized lithography. |
JPG |
Perkin
Elmer - Photo Gallery |
JPG |
| |
|
|
RVSI
|
File Type |
RVSI - WS-1000 Bumped Wafer Inspection System:
1990s |
JPG |
| |
|
|
Screen
|
File Type |
Screen -
The P210 Wet Processing System: 1980-84 |
JPG |
| |
|
|
SEMATECH
- Supporting Sponsor
|
File Type |
Dave Anderson: SEMATECH - An Oral History
|
Video |
Mike Polcari: What Math & Science Can Do for You
|
Video |
| |
|
|
Semiconductor Industry Association (SIA) |
File Type |
Moore's Law: 40 Years and Counting |
PDF |
Semiconductor Industry Association - New Semiconductor Group
Formed; No WEMA Pullout: 1970 |
PDF |
Wilf Corrigan: How the SIA Got Started and What it Accomplished |
Video |
Wilf Corrigan: The Development of the ASIC Industry |
Video |
Wilf Corrigan: Lessons He Learned and Why Fundamentals are Important
|
Video |
| |
|
|
Semiconductor
Research Corporation |
File Type |
The History and Accomplishments
|
Video |
| |
|
|
Semiconductor Systems
|
File Type |
Semiconductor System
- 150 Lithography Processing: 1990s |
JPG |
Semiconductor Systems - 8050 Lithography System:
1980-84 |
JPG |
Semiconductor Systems -
System 200 Coating Equipment:
1985-89 |
JPG |
| |
|
|
Semitool
|
File Type |
Semitool
- Developer/Stripper: 1986s - Rinser dryer: they sold boatloads of
these. |
JPG |
| |
|
|
SET
|
File Type |
SET -
MA 750 Mask Aligner: 1990s - A common example of how low
barriers to entry were. |
JPG |
SET - TP6050 GYRSET Spinner:
1990s |
JPG |
SET - TP6000 Spinner:
1990s |
JPG |
| |
|
|
Setek
|
File Type |
Setek - MS-610 Series Resist Processing:
1985-89 |
JPG |
| |
|
|
Shinkawa
|
File Type |
Shinkawa - SWB-FA-UTC-40 Wire Bonder: 1985-89 |
JPG |
| |
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Silicon
Valley Group (Acquired
by ASML) |
File Type |
Silicon Valley Group - 90 Series Resist Processing:
1990s |
JPG |
Silicon Valley Group -
Micrascan II: 1990s - Significant improvement in manufacturing
worthiness for the first
Step-and-Scan series. |
JPG |
Silicon Valley Group -
Micrascan III+ Step-and-Scan: 1990s |
JPG |
Silicon
Valley Group - Model 8800 ATS Track (Arm Transport System):
1988s |
JPG |
Silicon Valley Group - ProCell Track System:
1990s
- Innovation, stillborn. |
JPG |
| |
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|
Solitec
|
File Type |
Solitec -
1111-TD Constant Temperature Developer: 1985-89 |
JPG |
Solitec - 800 Series Automated
Track System: 1985-89 |
JPG |
| |
|
|
Sumitomo
Heavy Industries
|
File Type |
Sumitomo Heavy Industries - Aurora
X-ray SR Ring: 1990s - A precursor to the excimer laser. But it was solely for
X-ray wavelengths. It was an essential part of the infrastructure
developed for a Next Generation Lithography technology that never materialized for other reasons. Like a
ghost town, it is a relic of hard work and lost hopes and dreams. |
JPG |
| |
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Takeda
Riken
(Renamed to
Advantest) |
File Type |
Advantest - 50th Anniversary:
2004s |
JPG |
Advantest - Excerpt from 1986 Annual Report:
1986s |
JPG |
Advantest
- T3342 VLSI Test System: 1985-89 |
JPG |
Takeda Riken - Article 1982:
1982s |
JPG |
Takeda Riken – Excerpt from 1983 Annual Report:
1983s |
PDF |
Takeda Riken - Excerpt from 1985 Annual Report:
1985s |
JPG |
| |
|
|
Tazmo
|
File Type |
Tazmo - Spin Coater TR6000 and TR5000 Series:
1980-84 |
JPG |
| |
|
|
Technics
|
File Type |
Technics
- PE II-A Planar Etcher: 1980-84 |
JPG |
| |
|
|
Tegal
|
File Type |
Tegal - Plasma Inline 700 Single Wafer Etcher:
1980-84
- What the cutting edge of etching
looked like in 1980s |
JPG |
| |
|
|
TEL
|
File Type |
TEL -
40th Anniversary: 2003s |
Video |
TEL -
Clean Track Mark II: 1990s |
JPG |
TEL - Line Card:
1980-84 |
JPG |
TEL - Model TMC 4400-A Wafer Prober |
JPG |
| |
|
|
Tempress
|
File Type |
Tempress - DDC Diffusion furnace: 1980-84 - Wow!
Microprocessor control and thickness uniformities of +/- 5%. |
JPG |
Tempress
- Model 216 Pyrox Reactor: 1970s |
JPG |
| |
|
|
Teradyne
|
File Type |
Alex d'Arbeloff: Teradyne's Early Days
|
Video |
Alex d'Arbeloff: Building a Giant
|
Video |
Alex d'Arbeloff:
Lessons Learned
|
Video |
Nicholas DeWolf: The Father of ATE (Automatic
Test Equipment) |
HTML |
Teradyne
- J259
- The first true, computer controlled, IC Test System: 1960s |
JPG |
Teradyne
- J973 VLSI Test System: 1990s |
JPG |
| |
|
|
Thermco
|
File Type |
Thermco - Diffusion Furnace: 1960s |
JPG |
| |
|
|
Toshiba
|
File Type |
Toshiba - Magnetically Levitated
Interbay Carrier System |
JPG |
Toshiba - Space Linear Magnetically Levitated Carrier System:
1985-89
- Mag-lev automation system – Cool
technology that never went anywhere. |
JPG |
| |
|
|
Transistor
Automation
|
File Type |
Transistor
Automation
- Model XY540, Automatic Wafer Probing Machine:
1960s |
JPG |
| |
|
|
TRE
|
File Type |
TRE
- 800SLR Wafer Stepper: 1980-84 - productivity benchmark from the
mid-80’s at 55 4” wafers per hour. Today’s
benchmark is 3X that in wafers per hour, 15x in square inches
per hour, and 13757x in pixels per hour and
costs 31x in inflated dollars making for a 440x gain in
pixels-per-dollar or a gain of almost a thousand times
(814x) when inflation is accounted for. |
JPG |
| |
|
|
Tylan
|
File Type |
Tylan
- Baking System: 1985-89 |
JPG |
| |
|
|
Ultratech
(Formerly Ultratech Stepper)
|
File Type |
Dave Markle: Ultratech/Perkin Elmer - Math, Science &
Creativity |
Video |
Dave Markle: Ultratech/Perkin Elmer - The Development of the
Projection Aligner |
Video |
Ultratech -
Model 504 Resist Develop/Rinse System: 1980-84 |
JPG |
Ultratech
- Pellicle Equipment and Accessories: 1980-84 - We’ve come a long way.
|
JPG |
Ultratech - Positive Photoresist Develop Station
Model 503: 1985-89 |
JPG |
Ultratech - Positive Resist Develop/Rinse Station Model 504:
1985-89 |
JPG |
Ultratech
Stepper - Model 900 H/G Line stepper: 1980-84 |
JPG |
Ultratech Stepper - Saturn Stepper:
1990s |
JPG |
| |
|
|
Ultratech
Corporation (Predecessor to Ultratech Stepper)
|
File Type |
Coming soon... |
|
| |
|
|
Varian
|
File Type |
Varian - 3280 Cassette-to-Cassette Sputtering System: 1980-84 |
JPG |
Varian
- The MBE GEN II - Molecular Beam Epitaxy 1980-84 |
JPG |
Varian - Vacuum/Coater:
1970s |
JPG |
Varian - VLS 1000 Electron Beam Lithography:
1980-84 |
JPG |
| |
|
|
Veeco
|
File Type |
Veeco
- ai Model 2100 Ion Implanter: 1970s |
JPG |
Veeco
- Flexible Automated Wafer Fab System: 1985-89 - One of the best
early attempts at automation. |
JPG |
Veeco - Mix & Match Photoresist Processing: 1980-84 |
JPG |
Veeco
- Trackline 600 |
JPG |
| |
|
|
Verigy
|
File Type |
Debbora Ahlgren: What Math & Science Have Done for Me
|
Video |
Verigy -
(HP) 93000: 1990s |
JPG |
| |
|
|
Verteq
|
File Type |
Verteq - Ultraclean High Purity Megasonic System: 1990s |
JPG |
| |
|
|
Westech
|
File Type |
Westech
-
Model 372 Wafer Polisher: 1985-89 - They had the world on a string
and were sitting on a rainbow, but had no idea of what a customer was. The industry’s most significant
marketing failure of the nineties. |
JPG |
| |
|
|
X-TEK
|
File Type |
X-TEK - HMX Xray Inspection System:
1990s |
JPG |
| |
|